μ Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator

Irfan Ahmad 0003, Amro Emad Awad Ali, Yasser Bin Salamah. μ Feedback Controller With Feedforward Compensator for Scanning Tunneling Microscope Having 3D Cross-Coupled Piezoelectric Actuator. IEEE Access, 9:153750-153766, 2021. [doi]

Abstract

Abstract is missing.