External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

Analysis of circular cluster tools: Transient behavior and semiconductor equipment models

Younghun Ahn, James R. Morrison. Analysis of circular cluster tools: Transient behavior and semiconductor equipment models. In IEEE Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 21-24 August, 2010. pages 39-44, IEEE, 2010. [doi]

Authors

Younghun Ahn

This author has not been identified. Look up 'Younghun Ahn' in Google

James R. Morrison

This author has not been identified. Look up 'James R. Morrison' in Google
runs on