Younghun Ahn, James R. Morrison. Analysis of circular cluster tools: Transient behavior and semiconductor equipment models. In IEEE Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 21-24 August, 2010. pages 39-44, IEEE, 2010. [doi]
@inproceedings{AhnM10,
title = {Analysis of circular cluster tools: Transient behavior and semiconductor equipment models},
author = {Younghun Ahn and James R. Morrison},
year = {2010},
doi = {10.1109/COASE.2010.5584530},
url = {http://dx.doi.org/10.1109/COASE.2010.5584530},
researchr = {https://researchr.org/publication/AhnM10},
cites = {0},
citedby = {0},
pages = {39-44},
booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2010, Toronto, ON, Canada, 21-24 August, 2010},
publisher = {IEEE},
isbn = {978-1-4244-5447-1},
}