Eiichi Aizawa, Kazuyoshi Tsuchiya, Yasutomo Uetsuji. Design of ring type trench PZT for tube type micropump by using FEM analysis. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2012, Nagoya, Aichi, Japan, November 4-7, 2012. pages 197-200, IEEE, 2012. [doi]
Abstract is missing.