Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System - researchr publication authors

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T. Akazawa, D. Wu, Kai Sumita, N. Sekine, M. Okano, Kasidit Toprasertpong, S. Takagi, Mitsuru Takenaka. Low-capacitance Ultrathin InGaAs Membrane Photodetector on Si Slot Waveguide towards Receiver-less System. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 411-412, IEEE, 2022. [doi]

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