New insight in plasma charging impact on gate oxide breakdown in FDSOI technology

M. Akbal, G. Ribes, L. Vallier. New insight in plasma charging impact on gate oxide breakdown in FDSOI technology. In IEEE International Reliability Physics Symposium, IRPS 2015, Monterey, CA, USA, April 19-23, 2015. pages 2, IEEE, 2015. [doi]

Abstract

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