Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: a comparison by simulation

Elif Akçali, Reha Uzsoy, David G. Hiscock, Anne L. Moser, Timothy J. Teyner. Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: a comparison by simulation. In Winter Simulation Conference. pages 1428-1435, 2000. [doi]

Abstract

Abstract is missing.