Indicator of Alarm Risk on Product Degradation, Prediction for Alarms Grouping, Using Alarms Data in Semiconductor Manufacturing

Mohammed Al-Kharaz, Bouchra Ananou, Mustapha Ouladsine, Michel Combal, Jacques Pinaton. Indicator of Alarm Risk on Product Degradation, Prediction for Alarms Grouping, Using Alarms Data in Semiconductor Manufacturing. In 58th IEEE Conference on Decision and Control, CDC 2019, Nice, France, December 11-13, 2019. pages 4741-4746, IEEE, 2019. [doi]

Abstract

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