Phononic Film Bulk Acoustic Resonator for High mass-sensitive Biosensing

Aisha M. Al-Qahtani, Shawkat Ali 0002, Arshad Khan, Abdelkrim Khelif, Amine Bermak. Phononic Film Bulk Acoustic Resonator for High mass-sensitive Biosensing. In International Conference on Microelectronics, ICM 2022, Casablanca, Morocco, December 4-7, 2022. pages 246-249, IEEE, 2022. [doi]

Abstract

Abstract is missing.