Integration of SPAD in 28nm FDSOI CMOS technology

T. Chaves de Albuquerque, Francis Calmon, Raphael Clerc, Patrick Pittet, Y. Benhammou, Dominique Golanski, S. Jouan, D. Rideau, Andreia Cathelin. Integration of SPAD in 28nm FDSOI CMOS technology. In 48th European Solid-State Device Research Conference, ESSDERC 2018, Dresden, Germany, September 3-6, 2018. pages 82-85, IEEE, 2018. [doi]

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