Alina A. Alexeenko, Sruti Chigullapalli, Juan Zeng, Xiaohui Guo, Andrew Kovacs, Dimitrios Peroulis. Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches. Rel. Eng. & Sys. Safety, 96(9):1171-1183, 2011. [doi]
Abstract is missing.