Optimization of in-plane SiC capacitive accelerometers design parameters - researchr publication authors

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Ahmad Alfaifi, Ibrahim A. Alhomoudi, Mourad N. El-Gamal. Optimization of in-plane SiC capacitive accelerometers design parameters. In 14th IEEE International New Circuits and Systems Conference, NEWCAS 2016, Vancouver, BC, Canada, June 26-29, 2016. pages 1-4, IEEE, 2016. [doi]

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