Optimization of in-plane SiC capacitive accelerometers design parameters

Ahmad Alfaifi, Ibrahim A. Alhomoudi, Mourad N. El-Gamal. Optimization of in-plane SiC capacitive accelerometers design parameters. In 14th IEEE International New Circuits and Systems Conference, NEWCAS 2016, Vancouver, BC, Canada, June 26-29, 2016. pages 1-4, IEEE, 2016. [doi]

@inproceedings{AlfaifiAE16,
  title = {Optimization of in-plane SiC capacitive accelerometers design parameters},
  author = {Ahmad Alfaifi and Ibrahim A. Alhomoudi and Mourad N. El-Gamal},
  year = {2016},
  doi = {10.1109/NEWCAS.2016.7604774},
  url = {http://dx.doi.org/10.1109/NEWCAS.2016.7604774},
  researchr = {https://researchr.org/publication/AlfaifiAE16},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {14th IEEE International New Circuits and Systems Conference, NEWCAS 2016, Vancouver, BC, Canada, June 26-29, 2016},
  publisher = {IEEE},
  isbn = {978-1-4673-8900-6},
}