Thermal Stress Analysis and Stabilization of Metal and SU-8 Coatings for Tri-Layer Mirror

Mehdi Allameh, Shirin Ramezanzadehyazdi, Bvoungyoul Park, Cyrus Shafai. Thermal Stress Analysis and Stabilization of Metal and SU-8 Coatings for Tri-Layer Mirror. In 34th IEEE Canadian Conference on Electrical and Computer Engineering, CCECE 2021, Virtual Event, September 12-17, 2021. pages 1-5, IEEE, 2021. [doi]

Abstract

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