Micromachined polysilicon power dissipation: simulation and experiment

Walter Allegretto, Bing Shen, Todd C. Kleckner, Alexander M. Robinson. Micromachined polysilicon power dissipation: simulation and experiment. IEEE Trans. on CAD of Integrated Circuits and Systems, 16(6):627-637, 1997. [doi]

@article{AllegrettoSKR97,
  title = {Micromachined polysilicon power dissipation: simulation and experiment},
  author = {Walter Allegretto and Bing Shen and Todd C. Kleckner and Alexander M. Robinson},
  year = {1997},
  doi = {10.1109/43.640620},
  url = {http://doi.ieeecomputersociety.org/10.1109/43.640620},
  tags = {C++},
  researchr = {https://researchr.org/publication/AllegrettoSKR97},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
  volume = {16},
  number = {6},
  pages = {627-637},
}