Analysis of ESD failure mechanism in 65nm bulk CMOS ESD NMOSFETs with ESD implant

D. Alvarez, M. J. Abou-Khalil, C. Russ, Kiran V. Chatty, Robert Gauthier, D. Kontos, J. Li, C. Seguin, R. Halbach. Analysis of ESD failure mechanism in 65nm bulk CMOS ESD NMOSFETs with ESD implant. Microelectronics Reliability, 46(9-11):1597-1602, 2006. [doi]

Authors

D. Alvarez

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M. J. Abou-Khalil

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C. Russ

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Kiran V. Chatty

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Robert Gauthier

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D. Kontos

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J. Li

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C. Seguin

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R. Halbach

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