A set of test structures for the development of a CMOS-MEMS technology - researchr publication authors

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Carlos Ramon Baez Alvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga, Javier de la Hidalga Wade. A set of test structures for the development of a CMOS-MEMS technology. In 13th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2016, Mexico City, Mexico, September 26-30, 2016. pages 1-6, IEEE, 2016. [doi]

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