Carlos Ramon Baez Alvarez, Mónico Linares Aranda, Alfonso Torres-Jácome, Wilfrido Calleja Arriaga, Javier de la Hidalga Wade. A set of test structures for the development of a CMOS-MEMS technology. In 13th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2016, Mexico City, Mexico, September 26-30, 2016. pages 1-6, IEEE, 2016. [doi]
@inproceedings{AlvarezATAW16,
title = {A set of test structures for the development of a CMOS-MEMS technology},
author = {Carlos Ramon Baez Alvarez and Mónico Linares Aranda and Alfonso Torres-Jácome and Wilfrido Calleja Arriaga and Javier de la Hidalga Wade},
year = {2016},
doi = {10.1109/ICEEE.2016.7751206},
url = {http://dx.doi.org/10.1109/ICEEE.2016.7751206},
researchr = {https://researchr.org/publication/AlvarezATAW16},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {13th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2016, Mexico City, Mexico, September 26-30, 2016},
publisher = {IEEE},
isbn = {978-1-5090-3511-3},
}