Toward CMOS-Compatible Triboelectric Generator to Operate MEMS

Mohammad Alzgool, Mohammad Mousavi, Benyamin Davaji, Shahrzad Towfighian. Toward CMOS-Compatible Triboelectric Generator to Operate MEMS. In 2022 IEEE Sensors, Dallas, TX, USA, October 30 - Nov. 2, 2022. pages 1-4, IEEE, 2022. [doi]

Abstract

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