Modeling complex processability constraints in high-mix semiconductor manufacturing

Ahmed Ben Amira, Guillaume Lepelletier, Philippe Vialletelle, Stéphane Dauzère-Pérès, Claude Yugma, Philippe Lalevee. Modeling complex processability constraints in high-mix semiconductor manufacturing. In Winter Simulations Conference: Simulation Making Decisions in a Complex World, WSC 2013, Washington, DC, USA, December 8-11, 2013. pages 3719-3730, IEEE, 2013. [doi]

Abstract

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