Melissa P. Anenden, Martin Svehla, Nigel H. Lovell, Gregg J. Suaning. Process development for dry etching polydimethylsiloxane for neural electrodes. In 33rd Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2011, Boston, MA, USA, August 30 - Sept. 3, 2011. pages 2977-2980, IEEE, 2011. [doi]
Abstract is missing.