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Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode

Wan Chia Ang, Piotr Kropelmcki, Andrew Benson Randies, Yuandong Alex Gu, Kam Chew Leong, Chuan Seng Tan. Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode. In 2014 IEEE Ninth International Conference on Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), Singapore, April 21-24, 2014. pages 1-6, IEEE, 2014. [doi]

Authors

Wan Chia Ang

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Piotr Kropelmcki

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Andrew Benson Randies

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Yuandong Alex Gu

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Kam Chew Leong

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Chuan Seng Tan

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