Manufacturing aspects of an ultra-thin chip technology

Evangelos A. Angelopoulos, Muhammad S. Al-Shahed, Wolfgang Appel, Stefan Endler, Saleh Ferwana, Christine Harendt, Mahadi-Ul Hassan, Horst Rempp, Martin Zimmermann, Joachim N. Burghartz. Manufacturing aspects of an ultra-thin chip technology. In Proceedings of the 2012 European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, France, September 17-21, 2012. pages 141-144, IEEE, 2012. [doi]

Abstract

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