Angela Antoniu, Mark Salomons, Nicolae Reus. Effects of Electrostatic Charge Accumulation During MEMS Fabrication. In 2003 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2003), 20-23 July 2003, Banff, Alberta, Canada. pages 69-75, IEEE Computer Society, 2003. [doi]
Abstract is missing.