Stanislav Aranovskiy, Aleksandr A. Kapitonov, Alexey A. Bobtsov, Anton A. Pyrkin, Evgeny Zavarin, Denis Davydov, Romeo Ortega. Robust control of rapid thermal processes applied to vapor deposition processing. In 6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops, ICUMT 2014, St. Petersburg, Russia, October 6-8, 2014. pages 578-583, IEEE, 2014. [doi]
@inproceedings{AranovskiyKBPZDO14,
title = {Robust control of rapid thermal processes applied to vapor deposition processing},
author = {Stanislav Aranovskiy and Aleksandr A. Kapitonov and Alexey A. Bobtsov and Anton A. Pyrkin and Evgeny Zavarin and Denis Davydov and Romeo Ortega},
year = {2014},
doi = {10.1109/ICUMT.2014.7002165},
url = {http://dx.doi.org/10.1109/ICUMT.2014.7002165},
researchr = {https://researchr.org/publication/AranovskiyKBPZDO14},
cites = {0},
citedby = {0},
pages = {578-583},
booktitle = {6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops, ICUMT 2014, St. Petersburg, Russia, October 6-8, 2014},
publisher = {IEEE},
isbn = {978-1-4799-5291-5},
}