Arpys Arevalo, E. Byas, David Conchouso, David Castro, S. Ilyas, Ian G. Foulds. A versatile multi-user polyimide surface micromachinning process for MEMS applications. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 561-565, IEEE, 2015. [doi]
@inproceedings{ArevaloBCCIF15,
title = {A versatile multi-user polyimide surface micromachinning process for MEMS applications},
author = {Arpys Arevalo and E. Byas and David Conchouso and David Castro and S. Ilyas and Ian G. Foulds},
year = {2015},
doi = {10.1109/NEMS.2015.7147492},
url = {http://dx.doi.org/10.1109/NEMS.2015.7147492},
researchr = {https://researchr.org/publication/ArevaloBCCIF15},
cites = {0},
citedby = {0},
pages = {561-565},
booktitle = {10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015},
publisher = {IEEE},
isbn = {978-1-4673-6695-3},
}