Arpys Arevalo, E. Byas, David Conchouso, David Castro, S. Ilyas, Ian G. Foulds. A versatile multi-user polyimide surface micromachinning process for MEMS applications. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 561-565, IEEE, 2015. [doi]
Abstract is missing.