Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications - researchr publication authors

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Gregory Arndt, Cecilia Dupre, Julien Arcamone, Gerald Cibrario, Olivier Rozeau, Laurent Duraffourg, Eric Ollier, Éric Colinet. Towards ultra-dense arrays of VHF NEMS with FDSOI-CMOS active pixels for sensing applications. In 2012 IEEE International Solid-State Circuits Conference, ISSCC 2012, San Francisco, CA, USA, February 19-23, 2012. pages 320-322, IEEE, 2012. [doi]

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