Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.
Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.
F. R. Ashley, E. B. Murphy, H. J. Savard. Device photolithography: A computer controlled coordinate measuring machine. Bell Syst. Tech. J., 49(9):2193-2202, 1970. [doi]
Abstract is missing.