Effects of residual stresses on cracking and delamination risks of an avionics MEMS pressure sensor

Jürgen Auersperg, C. Collet, Th. Dean, Dietmar Vogel, Th. Winkler. Effects of residual stresses on cracking and delamination risks of an avionics MEMS pressure sensor. Microelectronics Reliability, 64:665-668, 2016. [doi]

Abstract

Abstract is missing.