MEMS acoustic emission sensor with mechanical noise rejection

Christian Auerswald, Alexander Sorger, M. Dienel, A. Shaporin, Jan Mehner. MEMS acoustic emission sensor with mechanical noise rejection. In International Multi-Conference on Systems, Signals & Devices, SSD 2012, Chemnitz, Germany, March 20-23, 2012. pages 1-6, IEEE, 2012. [doi]

Abstract

Abstract is missing.