Svetlana Avramov-Zamurovic, Nicholas G. Dagalakis, Rae Duk Lee, Jae-Myung Yoo, Yong-Sik Kim, Seung-Ho Yang. Embedded Capacitive Displacement Sensor for Nanopositioning Applications. IEEE T. Instrumentation and Measurement, 60(7):2730-2737, 2011. [doi]
Abstract is missing.