MEMS and microsystems for navigation, sensing, and spectral processing

Farrokh Ayazi. MEMS and microsystems for navigation, sensing, and spectral processing. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2012, Nagoya, Aichi, Japan, November 4-7, 2012. pages 1, IEEE, 2012. [doi]

Abstract

Abstract is missing.