E. Aydin, M. Kangul, F. Gokce, Özge Zorlu, Haluk Kulah. A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
@inproceedings{AydinKGZK16,
title = {A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination},
author = {E. Aydin and M. Kangul and F. Gokce and Özge Zorlu and Haluk Kulah},
year = {2016},
doi = {10.1109/ICSENS.2016.7808938},
url = {https://doi.org/10.1109/ICSENS.2016.7808938},
researchr = {https://researchr.org/publication/AydinKGZK16},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
publisher = {IEEE},
isbn = {978-1-4799-8287-5},
}