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A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination

E. Aydin, M. Kangul, F. Gokce, Özge Zorlu, Haluk Kulah. A novel characterization method for MEMS based electrostatic resonators for Q enhancement and feedthrough current elimination. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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