Heiko Aydt, Stephen John Turner, Wentong Cai, Malcolm Yoke-Hean Low, Peter Lendermann, Boon-Ping Gan. Symbiotic Simulation Control in Semiconductor Manufacturing. In Marian Bubak, G. Dick van Albada, Jack Dongarra, Peter M. A. Sloot, editors, Computational Science - ICCS 2008, 8th International Conference, Kraków, Poland, June 23-25, 2008, Proceedings, Part III. Volume 5103 of Lecture Notes in Computer Science, pages 26-35, Springer, 2008. [doi]
Abstract is missing.