Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias

Yasmine Badr, Andres Torres, Puneet Gupta. Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias. In Proceedings of the 52nd Annual Design Automation Conference, San Francisco, CA, USA, June 7-11, 2015. pages 70, ACM, 2015. [doi]

@inproceedings{BadrTG15,
  title = {Mask assignment and synthesis of DSA-MP hybrid lithography for sub-7nm contacts/vias},
  author = {Yasmine Badr and Andres Torres and Puneet Gupta},
  year = {2015},
  doi = {10.1145/2744769.2744868},
  url = {http://doi.acm.org/10.1145/2744769.2744868},
  researchr = {https://researchr.org/publication/BadrTG15},
  cites = {0},
  citedby = {0},
  pages = {70},
  booktitle = {Proceedings of the 52nd Annual Design Automation Conference, San Francisco, CA, USA, June 7-11, 2015},
  publisher = {ACM},
  isbn = {978-1-4503-3520-1},
}