Ulrich Baehr, Marvin Freier, Matthew Lewis 0003, Wolfgang Rosenstiel, Oliver Bringmann 0001. A New Method for Detecting Leaks in MEMS Accelerometers at Wafer-Level. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]
Abstract is missing.