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Interaction of ::::Bis::::-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO::2:: Thin-Film Growth Using Density Functional Theory

Seung-Bin Baek, Dae-Hee Kim, Yeong Cheol Kim. Interaction of ::::Bis::::-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO::2:: Thin-Film Growth Using Density Functional Theory. IEICE Transactions, 94-C(5):771-774, 2011. [doi]

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