Chul-Heum Baek, Litao Yao, Sung-Bo Seo, Hwa-Min Kim, Dae-Seung Pyo, Pyo-Hwan Hong, Jung-Hwa Oh, Dae-Young Kong, Chan-Seob Cho, Jong-Hyun Lee, In-Yong Eom, Bonghwan Kim. Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 903-906, IEEE, 2013. [doi]
Abstract is missing.