New design of RF MEMS disk resonators and optimization for spurious modes

Masoud Baghelani, Habib Badri Ghavifekr. New design of RF MEMS disk resonators and optimization for spurious modes. In 19th European Conference on Circuit Theory and Design, ECCTD 2009, Antalya, Turkey, August 23-27, 2009. pages 894-897, IEEE, 2009. [doi]

Abstract

Abstract is missing.