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Geometry optimization of a Lorentz force, resonating MEMS magnetometer

M. Bagherinia, Matteo Bruggi, Alberto Corigliano, Stefano Mariani, Ernesto Lasalandra. Geometry optimization of a Lorentz force, resonating MEMS magnetometer. Microelectronics Reliability, 54(6-7):1192-1199, 2014. [doi]

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M. Bagherinia

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Matteo Bruggi

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Alberto Corigliano

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Stefano Mariani

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Ernesto Lasalandra

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