Geometry optimization of a Lorentz force, resonating MEMS magnetometer

M. Bagherinia, Matteo Bruggi, Alberto Corigliano, Stefano Mariani, Ernesto Lasalandra. Geometry optimization of a Lorentz force, resonating MEMS magnetometer. Microelectronics Reliability, 54(6-7):1192-1199, 2014. [doi]

Abstract

Abstract is missing.