Highly sensitive silicon micro-g accelerometers with optical output

Salvatore Baglio, Salvatore Castorina, Jaume Esteve, Nicolò Savalli. Highly sensitive silicon micro-g accelerometers with optical output. In ISCAS (4). pages 868-871, 2004.

Authors

Salvatore Baglio

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Salvatore Castorina

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Jaume Esteve

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Nicolò Savalli

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