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Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology

Liping Bai, Naiqi Wu, Zhiwu Li, MengChu Zhou. Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 46(10):1456-1467, 2016. [doi]

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