Temperature and pressure characterization of the quality factor in a CMOS-MEMS resonator

Saoni Banerji, Jordi Madrenas, Daniel Fernández. Temperature and pressure characterization of the quality factor in a CMOS-MEMS resonator. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

Abstract

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