Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500/spl deg/C

Diego Barrettino, Markus Graf, Wan Ho Song, Kay-Uwe Kirstein, Andreas Hierlemann, Henry Baltes. Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500/spl deg/C. J. Solid-State Circuits, 39(7):1202-1207, 2004. [doi]

Authors

Diego Barrettino

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Markus Graf

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Wan Ho Song

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Kay-Uwe Kirstein

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Andreas Hierlemann

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Henry Baltes

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