A color vision system for microelectronics: Application to oxide thickness measurements - researchr publication authors

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Matt Barth, Srinivasan Parthasarathy, Jing Wang, Evelyn Hu, Susan Hackwood, Gerardo Beni. A color vision system for microelectronics: Application to oxide thickness measurements. In Proceedings of the 1986 IEEE International Conference on Robotics and Automation, San Francisco, California, USA, April 7-10, 1986. pages 1242-1247, IEEE, 1986. [doi]

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