A methodology to extract failure rates for low-k dielectric breakdown with multiple geometries and in the presence of die-to-die linewidth variation - researchr publication

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Muhammad Bashir, Linda S. Milor. A methodology to extract failure rates for low-k dielectric breakdown with multiple geometries and in the presence of die-to-die linewidth variation. Microelectronics Reliability, 49(9-11):1096-1102, 2009. [doi]

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