Impact of irregular geometries on low-k dielectric breakdown

Muhammad Bashir, Linda Milor, Dae-Hyun Kim, Sung Kyu Lim. Impact of irregular geometries on low-k dielectric breakdown. Microelectronics Reliability, 51(9-11):1582-1586, 2011. [doi]

Authors

Muhammad Bashir

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Linda Milor

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Dae-Hyun Kim

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Sung Kyu Lim

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